Effect of Phase Thickness on Capacity

 


Capacities (ng) vs Film Thickness 

 

 

Film

 

 

0.10

0.25

1.0

5.0

ID

0.10

8

 

 

 

0.25

20

50

200

 

0.32

 

70

280

1200

0.53

 

 

2300

4500


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